Complete spincoating assembly for 100-130 mm flat substrates
-
Spinbowl made of anodized and coated aluminum, with removable splash shield made from stainless steel.
-
Spin bowl has 2 KF type connecions for exhaust air connection
-
Spin bowl has 1 connection for fluid recycling
-
Complete with vacuum hold down chuck through center shaft
-
Complete with Mitsubishi AC servo motor, mounted off center
-
Motor type: HA-FE13, with brake
-
Motor input: 3 x 117 V, 50-60 Hz
-
Motor rating: 100 W
-
Nominal motor speed: 3000 rpm
-
Motor made in Japan
-
Height of assembly is 400 cm / 16"
-
Complete with matching driver Mitsubishi MR-J10A
-
Driver Input: 200-230 VAC, 50/60 Hz, 1-phase
-
Net weight: 22.5 lbs
Your Name:
Your Email:
Your Question: