Complete spincoating assembly for 120 mm substrates
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Spinbowl made of non magnetic metal with splash shield made from Teflon
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Splash shield has cut out for retracting dosing nozzle (dosing nozzle not included)
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Spin bowl has 2" connection for recess station for Complete with
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Complete with vacuum hold down chuck through center shaft
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Complete with Mitsubishi AC servo motor, mounted off center
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Motor type: HC-MF-73-UE
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Motor input: 3 x 117 V, 50-60 Hz
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Motor rating: 750 W
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Nominal motor speed: 3000 rpm
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Motor made in Japan
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Net weight: 28 lbs