Unaxis ARQ131 silicone sputter target

Sputter target for Unaxis / Balzers sputter coater with ARQ131 cathode

• Target material: Silicone, p-type, Boron doped, mono-crystalline, Resistivity 0.2 ohm cm, orientation 1-0-0
• Material purity: 99.999%
• Target thickness: 6 mm
• Target diameter: 200 mm
• Backing plate: Molybdenum
• Backing plate thickness: 8 mm
• Backing plate diameter: 240 mm
• Unaxis / balzers part number: BD483264-T
• Part is new, in hermetically sealed original packaging
• Complete with membrane
• Made in Switzerland

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