Load / lock sputter metalizer

Complete sputter metalizer complete with Sputter cathode, DC sputter power supply, motor and driver. Ready for your customization.

• Vacuum chamber with 3 top side ports for cathode and 2 load/locks for 120 mm flat substrates. Chamber has enough space to handle substrates of 160 mm diameter. Chamber height can be modified to handle deeper substrates

• Internal dial with 3 substrate carriers

• Bottom side port for turbomolecular pump with 100 mm flange.

• Center Column with drive for internal dial and Bimba lift cylinder to push internal dial against chamber cover to seal off the load lock chambers while loading unloading.

• Includes Yokogawa DD Servoactuator Model DR1015B80, suffix *1/L1D94291, serial number 198RM18677M8

• Includes cables for servo motor

• Nominal index time: 0.2 seconds

• Complete with round sputter cathode for 120 mm substrates

• Complete with Advanced Energy Pinnacle, sputter power supply, 8 KW pulsed, 400 Volt, 3-phase, 22 Amps, type 3152352-123B

• Estimated weight - packed 2500 pounds - 1135 kg

• Packed dimensions (wooden crate): 26" x 32 " x 30" high (65 cm x 81 cm x 76 cm)

• Please contact us for shipping options

• Please allow 1-3 days for packing

• Year of Manufacture: 1999 / 2000

• Assembled in the Netherlands

• Please inquire regarding shipping options

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