Unaxis / Balzers ARQ900 Sputter Cathode
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Sputter cathode for Balzers / Unaxis / Oerlikon CD metalizer. Previously used for high rate aluminum sputtering on 120 mm round substrate.
- Cathode part number 102023196
- Magnet array part number 102023153
- No visible defects and magnet field on OD and ID are strong.
- Made in Switzerland
- Part is untested, and history of part is not clear.
- Part is sold on AS IS basis, without return option at greatly reduced price
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