Spincoat unit f. 120 mm substr. 3000 rpm
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Complete spincoating assembly for 100-130 mm flat substrates
- Spinbowl made of anodized and coated aluminum, with removable splash shield made from stainless steel.
- Spin bowl has 2 KF type connecions for exhaust air connection
- Spin bowl has 1 connection for fluid recycling
- Complete with vacuum hold down chuck through center shaft
- Complete with Mitsubishi AC servo motor, mounted off center
- Motor type: HA-FE13, with brake
- Motor input: 3 x 117 V, 50-60 Hz
- Motor rating: 100 W
- Nominal motor speed: 3000 rpm
- Motor made in Japan
- Height of assembly is 400 cm / 16"
- Complete with matching driver Mitsubishi MR-J10A
- Driver Input: 200-230 VAC, 50/60 Hz, 1-phase
- Net weight: 22.5 lbs
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